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Home > Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28, 1971, Garmisch-Partenkirchen, Bavaria, Germany

Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28, 1971, Garmisch-Partenkirchen, Bavaria, Germany


Book Informaton

Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28, 1971, Garmisch-Partenkirchen, Bavaria, Germany

Author

Ingolf Ruge; J. Graul

Year of Publication

1971

Publisher

Springer Berlin Heidelberg

City of Publication

Berlin; New York

Pages

XIV, 508

Language

EN

ISBN

9783540056669, 9783642806605, 3540056661

ARI Id

1664252122036


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Showing 1 to 20 of 69 entries