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Home > Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982

Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982


Book Informaton

Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982

Author

H. Ryssel; H. Glawischnig

Series

Springer Series in Electronics and Photonics

Volume

10

Year of Publication

1982

Publisher

Springer Berlin Heidelberg

City of Publication

Berlin

Pages

XII, 374

Language

EN

ISBN

9783540118787, 9783642687792, 3540118780

ARI Id

1664550330835


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