Home > Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
Ion Implantation Techniques: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
Book Informaton
Author
H. Ryssel; H. Glawischnig
Series
Springer Series in Electronics and Photonics
Volume
10
Year of Publication
1982
Publisher
Springer Berlin Heidelberg
City of Publication
Berlin
Pages
XII, 374
Language
EN
ISBN
9783540118787, 9783642687792, 3540118780
ARI Id
1664550330835
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