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Home > Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices


Book Informaton

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Author

O. Auciello; Jürgen Engemann

Series

NATO Science Series E:

Volume

234

Year of Publication

1993

Publisher

Springer Netherlands

City of Publication

Dordrecht; Boston

Pages

XV, 633

Language

EN

ISBN

9780792322658, 9789401117272, 0792322657

ARI Id

1664610283921


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