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Nanoimprint Lithography: An Enabling Process for Nanofabrication

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Nanoimprint Lithography: An Enabling Process for Nanofabrication

Author

Weimin Zhou

Year of Publication

2013

Publisher

Springer Berlin Heidelberg

Pages

XIII, 249

Language

en

ISBN

9783642344275, 9783642344282

ARI Id

1664817756958

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Topics
Lithography