Home > VLSI Metallization
VLSI Metallization
Book Informaton
Author
Norman G. Einspruch; Simon S. Cohen; Gennady Sh. Gildenblat
Series
VLSI Electronics Microstructure Science
Volume
15
Year of Publication
1987
Publisher
Elsevier
City of Publication
Orlando
Pages
480
Language
en
ISBN
9780122341151, 0122341155
ARI Id
1665472717587
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