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Handbook of Vacuum Science and Technology

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Handbook of Vacuum Science and Technology

Author

Dorothy M. Hoffman; Bawa Singh; John H. Thomas III and John H. Thomas III

Year of Publication

1998

Publisher

Academic Press

City of Publication

San Diego, CA

Pages

835

Language

en

ISBN

9780123520654, 0123520657

ARI Id

1665590890149

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