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Handbook of 3D Integration Volume 3 - 3D Process Technology

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Handbook of 3D Integration Volume 3 - 3D Process Technology

Author

Philip Garrou; Mitsumasa Koyanagi; Peter Ramm

Edition

1st Edition

Year of Publication

2014

Publisher

John Wiley & Sons

Language

en

ISBN

3527334661, 3527670106, 3527670130, 9783527334667, 9783527670109, 9783527670130

ARI Id

1668207448589

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Topics
Integrated circuits Microelectronics