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Introduction to Microfabrication 2e

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Introduction to Microfabrication 2e

Author

Sami Franssila

Edition

2nd Edition

Year of Publication

2010

Publisher

John Wiley & Sons

Pages

536

Language

en

ISBN

470749830, 1119990416, 470666722, 9780470749838, 9781119990413, 9780470666722

ARI Id

1668215750540

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Topics
Engineering Nonfiction Technology Microelectromechanical systems Microfabrication Electronic apparatus and appliances Electromechanical devices