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> Metallization: theory and practice for VLSI and ULSI
Metallization: theory and practice for VLSI and ULSI
Book Informaton
Author
S. P. Murarka
Year of Publication
1993
Publisher
Butterworth-Heinemann
City of Publication
Boston
Pages
250
Language
en
ISBN
0750690011
ARI Id
1672663449232
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Topics
Integrated circuits -- Very large scale integration.
Metallizing.
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