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Home > Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982

Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982


Book Informaton

Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982

Author

Heiner Ryssel; Hans Glawischnig

Series

Springer Series in Electronics and Photonics

Volume

11

Year of Publication

1983

Publisher

Springer Berlin Heidelberg

City of Publication

Berlin, Heidelberg

Language

EN

ISBN

9783540124917, 9783642691560

ARI Id

1674219777157


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