Home > Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
Book Informaton
Author
Heiner Ryssel; Hans Glawischnig
Series
Springer Series in Electronics and Photonics
Volume
11
Year of Publication
1983
Publisher
Springer Berlin Heidelberg
City of Publication
Berlin, Heidelberg
Language
EN
ISBN
9783540124917, 9783642691560
ARI Id
1674219777157
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