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Chemical-mechanical planarization--integration, technology and reliability: symposium held March 28-31, 2005, San Francisco, California, U. S. A. /


Book Informaton

Chemical-mechanical planarization--integration, technology and reliability: symposium held March 28-31, 2005, San Francisco, California, U. S. A. /

Author

Aśoka Kumāra.

Series

Materials Research Society symposium proceedings;

Volume

867

Year of Publication

c2005.

Publisher

Materials Research Society,

Pages

302

Language

en

ISBN

1558998209, 9781558998209

ARI Id

1674932775757


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