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Home > Low-dielectric constant materials-- synthesis and applications in microelectronics: symposium held April 17-19, 1995, San Francisco, California, U. S. A. /

Low-dielectric constant materials-- synthesis and applications in microelectronics: symposium held April 17-19, 1995, San Francisco, California, U. S. A. /


Book Informaton

Low-dielectric constant materials-- synthesis and applications in microelectronics: symposium held April 17-19, 1995, San Francisco, California, U. S. A. /

Author

Lu, T.-M.

Series

Materials Research Society symposium proceedings; v. 381

Year of Publication

[1995], ©1995.

Publisher

Materials Research Society,

City of Publication

Pittsburgh, Pa

Pages

288

Language

en

ISBN

1558992847

ARI Id

1675078465503


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