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Home > Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado /

Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado /


Book Informaton

Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado /

Author

Stover, John C.

Series

SPIE proceedings series;

Volume

v. 2862

Year of Publication

[1996], ©1996.

Publisher

SPIE,

City of Publication

Bellingham, Wash

Pages

204

Language

en

ISBN

0819422509

ARI Id

1675156423022


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