Home > Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October, 1997, Austin, Texas /
Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October, 1997, Austin, Texas /
Book Informaton
Author
Ghanbari, Abe.; Toprac, Anthony J.
Series
Proceedings / SPIE--the International Society for Optical Engineering;
Volume
v. 3213
Year of Publication
[1997], ©1997.
Publisher
SPIE,
City of Publication
Bellingham, Washington
Pages
270
Language
en
ISBN
0819426458
ARI Id
1675203717373
This page has been accessed 5 times.
Citation Options
Download CitationShowing 1 to 20 of 29 entries
Chapters/Headings | Author(s) | Pages | Info |
Chapters/Headings | Author(s) | Pages | Info |
Showing 1 to 20 of 29 entries