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Home > Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October, 1997, Austin, Texas /

Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October, 1997, Austin, Texas /


Book Informaton

Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October, 1997, Austin, Texas /

Author

Ghanbari, Abe.; Toprac, Anthony J.

Series

Proceedings / SPIE--the International Society for Optical Engineering;

Volume

v. 3213

Year of Publication

[1997], ©1997.

Publisher

SPIE,

City of Publication

Bellingham, Washington

Pages

270

Language

en

ISBN

0819426458

ARI Id

1675203717373


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