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Home > Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II: 29-30 January 1998, San Jose, California /

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II: 29-30 January 1998, San Jose, California /


Book Informaton

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II: 29-30 January 1998, San Jose, California /

Author

Stover, John C.

Series

SPIE proceedings series;

Volume

v. 3275

Year of Publication

[1998], ©1998.

Publisher

SPIE,

City of Publication

Bellingham, Wash., USA

Pages

206

Language

en

ISBN

0819427144

ARI Id

1675247068287


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