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Home > Microelectronic structures and MEMS for optical processing IV: 21-22 September, 1998, Santa Clara, California /

Microelectronic structures and MEMS for optical processing IV: 21-22 September, 1998, Santa Clara, California /


Book Informaton

Microelectronic structures and MEMS for optical processing IV: 21-22 September, 1998, Santa Clara, California /

Author

Motamedi, M. Edward.; Herzig, Hans Peter.

Series

Proceedings of SPIE,

Volume

v. 3513

Year of Publication

[1998], ©1998.

Publisher

SPIE,

City of Publication

Bellingham, Washington

Pages

240

Language

en

ISBN

0819429724

ARI Id

1675360914546


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