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Chemical-mechanical polishing--fundamentals and challenges: symposium held April 5-7, 1999, San Francisco, California, U. S. A. /


Book Informaton

Chemical-mechanical polishing--fundamentals and challenges: symposium held April 5-7, 1999, San Francisco, California, U. S. A. /

Author

Babu, S. V.

Series

Materials Research Society symposium proceedings;

Volume

v. 566

Year of Publication

[2000], ©2000.

Publisher

Materials Research Society,

Pages

281

Language

en

ISBN

1558994734, 9781558994737

ARI Id

1675415676052


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Materials Research Society Symposium Proceedings
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