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Home > MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging and assembly: 28-29 October 2002, Brugge, Belgium /

MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging and assembly: 28-29 October 2002, Brugge, Belgium /


Book Informaton

MEMS/MOEMS: advances in photonic communications, sensing, metrology, packaging and assembly: 28-29 October 2002, Brugge, Belgium /

Author

Behringer, Uwe F. W.

Series

SPIE proceedings series,

Volume

v. 4945

Year of Publication

[2003], ©2003.

Publisher

SPIE,

City of Publication

Bellingham, Wash., USA

Pages

203

Language

en

ISBN

0819447404

ARI Id

1675542643403


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