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Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U. S. A. /


Book Informaton

Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U. S. A. /

Author

Boning, Duane S.

Series

Materials Research Society symposium proceedings;

Volume

767

Year of Publication

[2003], ©2003.

Publisher

Materials Research Society,

City of Publication

Warrendale, Pa

Pages

376

Language

en

ISBN

1558997040

ARI Id

1675562792236


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Materials Research Society Symposium Proceedings
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