Home > Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U. S. A. /
Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U. S. A. /
Book Informaton
Author
Boning, Duane S.
Series
Materials Research Society symposium proceedings;
Volume
767
Year of Publication
[2003], ©2003.
Publisher
Materials Research Society,
City of Publication
Warrendale, Pa
Pages
376
Language
en
ISBN
1558997040
ARI Id
1675562792236
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