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Home > Lithographic and micromachining techniques for optical component fabrication II: 3-4 August, 2003, San Diego, California, USA /

Lithographic and micromachining techniques for optical component fabrication II: 3-4 August, 2003, San Diego, California, USA /


Book Informaton

Lithographic and micromachining techniques for optical component fabrication II: 3-4 August, 2003, San Diego, California, USA /

Author

Kley, Ernst-Bernhard.; Herzig, Hans Peter.

Series

SPIE proceedings series;

Volume

v. 5183

Year of Publication

[2003], ©2003.

Publisher

SPIE,

City of Publication

Bellingham, Wash

Pages

208

Language

en

ISBN

0819450561

ARI Id

1675573829238


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