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Home > Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003: symposium held April 21-25, 2003, San Francisco, California, U. S. A /

Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003: symposium held April 21-25, 2003, San Francisco, California, U. S. A /


Book Informaton

Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003: symposium held April 21-25, 2003, San Francisco, California, U. S. A /

Author

McKerrow, Andrew J.

Series

Materials Research Society symposium proceedings;

Volume

v. 766

Year of Publication

[2003], ©2003.

Publisher

Materials Research Society,

City of Publication

Warrendale, Pa

Pages

562

Language

en

ISBN

1558997032

ARI Id

1675602116814


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