Home > Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003: symposium held April 21-25, 2003, San Francisco, California, U. S. A /
Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003: symposium held April 21-25, 2003, San Francisco, California, U. S. A /
Book Informaton
Author
McKerrow, Andrew J.
Series
Materials Research Society symposium proceedings;
Volume
v. 766
Year of Publication
[2003], ©2003.
Publisher
Materials Research Society,
City of Publication
Warrendale, Pa
Pages
562
Language
en
ISBN
1558997032
ARI Id
1675602116814
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