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Home > Advances in mirror technology for X-ray, EUV lithography, laser and other applications: 7-8 August 2003, San Diego, California, USA /

Advances in mirror technology for X-ray, EUV lithography, laser and other applications: 7-8 August 2003, San Diego, California, USA /


Book Informaton

Advances in mirror technology for X-ray, EUV lithography, laser and other applications: 7-8 August 2003, San Diego, California, USA /

Author

Khounsary, Ali M.; Dinger, Udo.; Ota, Kazuya.

Series

SPIE proceedings series,

Volume

v. 5193

Year of Publication

[2004], ©2004.

Publisher

SPIE,

City of Publication

Bellingham, Wash., USA

Pages

222

Language

en

ISBN

0819450669

ARI Id

1675608817041


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