Home > Micromachining and microfabrication process technology IX: 27-29 January 2004, San Jose, California, USA /
Micromachining and microfabrication process technology IX: 27-29 January 2004, San Jose, California, USA /
Book Informaton
Author
Perez-Maher, Mary Ann.; Jakubczak, Jerome Florian.
Series
SPIE proceedings series,
Volume
v. 5342
Year of Publication
[2004], ©2004.
Publisher
SPIE,
City of Publication
Bellingham, Wash., USA
Pages
276
Language
en
ISBN
0819452505
ARI Id
1675614910200
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