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Home > Device and process technologies for MEMS, microelectronics, and photonics III: 10-12 December 2003, Perth, Australia /

Device and process technologies for MEMS, microelectronics, and photonics III: 10-12 December 2003, Perth, Australia /


Book Informaton

Device and process technologies for MEMS, microelectronics, and photonics III: 10-12 December 2003, Perth, Australia /

Author

Chiao, Jung-Chih.

Series

SPIE proceedings series,

Volume

v. 5276

Year of Publication

[2004], ©2004.

Publisher

SPIE,

City of Publication

Bellingham, Wash

Pages

612

Language

en

ISBN

081945169X

ARI Id

1675624751945


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