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Home > Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U. S. A. /

Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U. S. A. /


Book Informaton

Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U. S. A. /

Author

Zwicker, Gerfried.

Series

Materials Research Society symposium proceedings;

Volume

v. 991

Publisher

Materials Research Society, c2007.

City of Publication

Warrendale, Pa

Pages

371

Language

en

ISBN

1558999515, 9781558999510

ARI Id

1675701188701


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