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Advances in chemical-mechanical polishing: symposium held April 13-15, 2004, San Francisco, California, U. S. A. /


Book Informaton

Advances in chemical-mechanical polishing: symposium held April 13-15, 2004, San Francisco, California, U. S. A. /

Author

Boning, Duane S.

Series

Materials Research Society symposium proceedings;

Volume

v. 816

Year of Publication

[2004], ©2004.

Publisher

Materials Research Society,

Pages

292

Language

en

ISBN

1558997660, 9781558997660

ARI Id

1675719046141


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