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Home > Materials, technology and reliability for advanced interconnects and low-k dielectrics: symposium held April 13-15 2004, San Francisco, California, U. S. A. /

Materials, technology and reliability for advanced interconnects and low-k dielectrics: symposium held April 13-15 2004, San Francisco, California, U. S. A. /


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Materials, technology and reliability for advanced interconnects and low-k dielectrics: symposium held April 13-15 2004, San Francisco, California, U. S. A. /

Author

Carter, R. J.

Series

Materials Research Society symposia proceedings;

Volume

v. 812

Year of Publication

2004.

Publisher

Materials Research Society,

City of Publication

Warrendale, Pa

Pages

438

Language

en

ISBN

1558997628

ARI Id

1675863168509


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