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Home > Development of new characterization techniques for thin-film silicon-on-insulator (SOI) materials and devices

Development of new characterization techniques for thin-film silicon-on-insulator (SOI) materials and devices


Book Informaton

Development of new characterization techniques for thin-film silicon-on-insulator (SOI) materials and devices

Author

Ping-Chang Yang

Year of Publication

1993

Pages

123

Language

eng

ARI Id

1679752536780


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