Chapter: Atomistic Modeling of Defect Diffusion in SiGe

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Home > Simulation of Semiconductor Processes and Devices 2007: SISPAD 2007 > Atomistic Modeling of Defect Diffusion in SiGe

Simulation of Semiconductor Processes and Devices 2007: SISPAD 2007 |

Tibor Grasser; Siegfried Selberherr

Springer Vienna

Simulation of Semiconductor Processes and Devices 2007: SISPAD 2007

Atomistic Modeling of Defect Diffusion in SiGe

Chapter Info

Authors

P. Castrillo; R. Pinacho; J. E. Rubio; L. M. Vega; M. Jaraiz

ARI Id

1664319009609_1194226

Access

Not Available Free

Pages

9-12

DOI

10.1007/978-3-211-72861-1_2

Chapter URL

https://rd.springer.com/chapter/10.1007/978-3-211-72861-1_2

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