Chapter: 3D Micro Technology: Challenges for Optical Metrology

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Home > Fringe 2005: The 5th International Workshop on Automatic Processing of Finge Patterns > 3D Micro Technology: Challenges for Optical Metrology

Fringe 2005: The 5th International Workshop on Automatic Processing of Finge Patterns |

Wolfgang Osten

Springer Berlin Heidelberg

Fringe 2005: The 5th International Workshop on Automatic Processing of Finge Patterns

3D Micro Technology: Challenges for Optical Metrology

Chapter Info

Authors

Theodore Doll; Peter Detemple; Stefan Kunz; Thomas Klotzbücher

ARI Id

1664935178496_4135614

Access

Not Available Free

Pages

506-513

DOI

10.1007/3-540-29303-5_67

Chapter URL

https://rd.springer.com/chapter/10.1007/3-540-29303-5_67

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