Chapter: An Agent-based Common Software Platform Applied to Multi-scale Device and Process Simulations

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Home > Simulation of Semiconductor Processes and Devices 2001: SISPAD 01 > An Agent-based Common Software Platform Applied to Multi-scale Device and Process Simulations

Simulation of Semiconductor Processes and Devices 2001: SISPAD 01 |

Dimitris Tsoukalas; Christos Tsamis

Springer Vienna

Simulation of Semiconductor Processes and Devices 2001: SISPAD 01

An Agent-based Common Software Platform Applied to Multi-scale Device and Process Simulations

Chapter Info

Authors

Shirun Ho; Yasuyuki Ohkura; Masato Ikegawa; Nobuyuki Mise; Joshi Prasad; Yuko Kawashima et al.

ARI Id

1665041916470_4585394

Access

Not Available Free

Pages

372-375

DOI

10.1007/978-3-7091-6244-6_85

Chapter URL

https://rd.springer.com/chapter/10.1007/978-3-7091-6244-6_85

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