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Home > Particles On Surfaces: Detection, Adhesion, and Removal > Detection and Identification of Particles on Silicon Surfaces
Particles On Surfaces: Detection, Adhesion, and Removal |
K.L. Mittal
Routledge
Particles On Surfaces: Detection, Adhesion, and Removal
Detection and Identification of Particles on Silicon Surfaces
Authors

Takeshi Hattori

ARI Id

1665813396858_13826160

Access

Not Available Free

Pages

201-218

DOI

10.1201/9781003067429-11

Table of Contents of Book
Showing 1 to 20 of 23 entries
Chapters/HeadingsAuthor(s)PagesInfo
Particles on Surfaces: Adhesion Induced Deformations
D. S. Rimai; Lawrence P. DeMejo; Ray Bowen; Jeffrey D. Morris
1-32
Surface Force Tensile Interactions Between Micrometer Size Particles and a Polyester-PDMS Block Copolymer Substrate
Lawrence P. DeMejo; D. S. Rimai; Jiann H. Chen; Ray Bowen
33-46
Polymer to Particle Adhesion Probed with Atomic Force Microscopy
Howard Mizes; Mary L. Ott; K.-G. Loh; R. J. D. Miller
47-60
Surface Particle Contamination Identification in Microelectronics
Martine Simard-Normandin
61-76
An Overview of Spacecraft Particulate Contamination Phenomena
Michael C. Fong; Aleck L. Lee; Paul T. Ma
77-100
Contamination on Optical Surfaces-Concerns, Prevention, Detection, and Removal
Jean M. Bennett
101-110
An Advanced Surface Particle and Molecular Contaminant Identification, Removal, and Collection System
Steven P. Hotaling; Deidra A. Dykeman
111-140
The Role of Air Ionization in Reducing Surface Contamination by Particles in the Cleanroom
Scott Gehlke; Arnold J. Steinman
141-150
Selecting a Contamination-Free Deburring Process: Testing Abrasive Blasting Media
Walter L. Prater; Garvin J. Stone; Gwendolyn Jones Chung
151-188
Particle Generation and Control in Tubing and Piping Connection Design
Michele Alberg
189-200
Detection and Identification of Particles on Silicon Surfaces
Takeshi Hattori
201-218
The Characterization of Particles on Spacecraft Returned from Orbit
E. R. Crutcher
219-252
A Light-Scattering Method for Determining the Composition of Particles on Surfaces
Lowell D. Lamb; Donald R. Huffman; J. D. Lorentzen
253-264
Light Scattering by Spherical Particles on Planar Multi-Layered Substrates
Andreas Cangellaris; Fadi I. Assi
265-288
New Test Procedure for the Examination of the Particulate Cleanliness of Technical Surfaces
Hans-Jürgen Warnecke; Bernhard Klumpp
289-310
Discrimination Between Particulate and Film Type Contamination on Surfaces by Means of Total Reflection X-Ray Fluorescence Spectrometry
Heinrich Schwenke; Joachim Knoth
311-324
Particle Characterization on Surfaces by Auger Electron Spectroscopy
William F. Stickle; Dennis Paul; Lori A. LaVanier
325-334
Interrogating the Behavior of Micrometer-Sized Particles on Surfaces with Focused Acoustic Waves
Giles J. Brereton; B. A. Bruno
335-352
Removal of Glass Particles from Glass Surfaces: A Review
Asish Ghosh; William P. Ryszytiwskyj
353-362
Particle Removal Characteristics of Surface Cleaning Methods Involving Sonication and/or Spray Impingement
Ramamurthy Nagarajan
363-378
Chapters/HeadingsAuthor(s)PagesInfo
Showing 1 to 20 of 23 entries
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