Chapter: Metallization

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Home > Handbook of Semiconductor Interconnection Technology > Metallization

Handbook of Semiconductor Interconnection Technology |

Geraldine Cogin Shwartz; Geraldine C. Schwartz; Kris V. Srikrishnan

Routledge

Handbook of Semiconductor Interconnection Technology

Metallization

Chapter Info

Authors

Geraldine Cogin Schwartz and K.V. Srikrishnan

ARI Id

1666090744989_14697968

Access

Not Available Free

Pages

323-396

DOI

10.1201/9781420017656-8

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Chapters/Headings	Author(s)	Pages	Info
Methods/Principles of Deposition and Etching of Thin Films		13-74
Characterization	Geraldine Cogin Schwartz	75-164
Semiconductor Contact Technology	David R. Campbell, Revised by Catherine Ivers	165-222
Interlevel Dielectrics	Geraldine Cogin Schwartz and K.V. Srikrishnan	223-322
Metallization	Geraldine Cogin Schwartz and K.V. Srikrishnan	323-396
Chip Integration	Geraldine Cogin Schwartz and K.V. Srikrishnan	397-482
Reliability	James R. Lloyd; Kenneth P. Rodbell	483-518
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