Chapter: Chemical Mechanical Polishing and Its Applications in ULSI Process

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Home > Handbook of Lapping and Polishing > Chemical Mechanical Polishing and Its Applications in ULSI Process

Handbook of Lapping and Polishing |

Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi

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Chemical Mechanical Polishing and Its Applications in ULSI Process

Chapter Info

Authors

Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi

ARI Id

1666341873487_15495786

Access

Not Available Free

Pages

357-494

DOI

10.1201/9781420017632-11

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Chapters/Headings	Author(s)	Pages	Info
Introduction	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	17-22
Fundamentals of Lapping	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	23-108
Lapping of Ductile Materials	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	109-138
Lapping of Brittle Materials	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	139-280
Lapping and Lapping Machines	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	281-296
Polishing Technology	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	297-356
Chemical Mechanical Polishing and Its Applications in ULSI Process	Ioan D. Marinescu; Eckart Uhlmann; Toshiro Doi	357-494
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