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Home > Volume 88, Number 2 April 16 > Modelling of Dopant Profiles Modified by Diffusing Defects in Polycrystalline Silicon

Volume 88, Number 2 April 16 |
De Gruyter
Volume 88, Number 2 April 16

Modelling of Dopant Profiles Modified by Diffusing Defects in Polycrystalline Silicon
Authors

ARI Id

1666835715935_7900984

Access

Not Available Free

Pages

533

DOI

10.1515/9783112501085-017

Chapter URL

https://www.degruyter.com/document/doi/10.1515/9783112501085-017/html

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