Chapter: Formation and Annealing of Isolation Regions in Silicon through Si+ Bombardment

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Home > Volume 14, Number 1 November 16 > Formation and Annealing of Isolation Regions in Silicon through Si+ Bombardment

Volume 14, Number 1 November 16 |

Görlich

De Gruyter

Formation and Annealing of Isolation Regions in Silicon through Si+ Bombardment

Chapter Info

Authors

G. H Schwuttke; K Brack; E . F Gorey; A. Kahan; L. F Lowe; F Euler

ARI Id

1666836219949_7907676

Access

Not Available Free

Pages

107

DOI

10.1515/9783112496503-013

Chapter URL

https://www.degruyter.com/document/doi/10.1515/9783112496503-013/html

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