Chapter: Effect of Process Variables on Glass Frit Wafer Bonding in MEMS Wafer Level Packaging

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Home > Microelectromechanical systems--materials and devices II: symposium held December 1-2, 2008, Boston, Massachusetts, USA / > Effect of Process Variables on Glass Frit Wafer Bonding in MEMS Wafer Level Packaging

Microelectromechanical systems--materials and devices II: symposium held December 1-2, 2008, Boston, Massachusetts, USA / |

Vengallatore, Srikar.

Materials Research Society,

Microelectromechanical systems--materials and devices II: symposium held December 1-2, 2008, Boston, Massachusetts, USA /

Effect of Process Variables on Glass Frit Wafer Bonding in MEMS Wafer Level Packaging

Chapter Info

Authors

Sid Sridharan, Jim Henry, John Maloney, Bob Gardner, Keith Mason, Viorel Dragoi, Eric Pabo, Erkan Cakmak and Jurgen Burggraf

ARI Id

1674866371694_51148065

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Not Available Free

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