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Materials--fabrication and patterning at the nanoscale: symposium held April 19-20, 1995, San Francisco, California, U. S. A. / |
Cerrina, F.; Marrian, Christie R. K.
Materials Research Society,
Materials--fabrication and patterning at the nanoscale: symposium held April 19-20, 1995, San Francisco, California, U. S. A. /
Atomic Diffusion and Strain Measurement on Si Grating Structures by X-ray Diffraction
Authors

So Tanaka, Christopher C. Umbach, Qun Shen and Jack M. Blakely

ARI Id

1675083829204_51727690

Access

Open/Free Access

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