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Amorphous and nanocrystalline silicon science and technology--2004: Symposium held April 13-16, 2004, San Francisco, California, U. S. A. / |
Materials Research Society,
Amorphous and nanocrystalline silicon science and technology--2004: Symposium held April 13-16, 2004, San Francisco, California, U. S. A. /

Metal induced crystallization of SiGe at 370[degrees]C for monolithically integrated MEMS applications
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1675866216479_53741906

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