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> K.V. Vaidyanathan
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ANNEALING OF IMPLANTED LAYERS IN COMPOUND SEMICONDUCTORS BY LOCALIZED BEAM HEATING TECHNIQUES
C. Lawrence Anderson
;
H.L. Dunlap
;
L.D. Hess
;
G.L. Olson
;
K.V. Vaidyanathan
Laser and Electron Beam Processing of Materials
C.W. White
1980
Academic Press
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