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> Michele Vimercati et al.
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Piezoelectric Materials for MEMS
Andrea Picco
;
Paolo Ferrarini
;
Claudia Pedrini
;
Angela Cimmino
;
Lorenzo Vinciguerra
;
Michele Vimercati et al.
Silicon Sensors and Actuators: The Feynman Roadmap
Benedetto Vigna
;
Paolo Ferrari
;
Flavio Francesco Villa
;
Ernesto Lasalandra
;
Sarah Zerbini
1st ed. 2022
Springer International Publishing
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