"Takashi Tokuyama" appeared in Books and Chapters

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"Takashi Tokuyama" appeared in Books and Chapters

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Chapter	Author(s)	Book	Book Authors	Year	Publisher
Use of Ion Implantation in Device Fabrication at Hitachi CRL	Takashi Tokuyama	Ion Implantation in Semiconductors 1976	Fred Chernow	1977	Springer US
APPLICATION OF LASER ANNEALING TO SILICON DEVICE FABRICATION	Takashi Tokuyama	Laser and Electron Beam Processing of Materials	C.W. White	1980	Academic Press
DIRECT ION BEAM DEPOSITION	Kiyoshi Miyake; Takashi Tokuyama	Ion Beam Assisted Film Growth	T. Itoh	1989	Elsevier
Si-SiO2 Interface States Induced by Implantation of Various Ion Species	Takashi Tokuyama; Isao Yoshida; Terunori Warabisako	Ion Implantation in Semiconductors and Other Materials	Billy Crowder	1973	Springer US
LASER-ANNEALED POLYCRYSTALLINE SILICON CHARACTERISTICS	Yasuo Wada; Masao Tamura; Takashi Tokuyama	Laser and Electron Beam Processing of Materials	C.W. White	1980	Academic Press
Chapter	Author(s)	Book	Book Authors	Year	Publisher

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