"Mechanical Properties of 3C-SiC Films for MEMS Applications"

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Book	Author(s)	Year	Publisher
MEMS mechanical sensors	Stephen Beeby; et al	2004	Artech House
MEMS mechanical sensors /	Beeby, Stephen.	[2004], ©2004.	Artech House,
Nanostructured Thin Films and Coatings: Mechanical Properties	Sam Zhang	2010	Routledge
MEMS for Biomedical Applications	S. Bhansali and A. Vasudev	2012	Woodhead Publishing
MEMS: Applications	Mohamed Gad-el-Hak	2005	Routledge
Piezoresistive Effect of p-Type Single Crystalline 3C-SiC: Silicon Carbide Mechanical Sensors for Harsh Environments	Hoang-Phuong Phan	1st ed. 2017	Springer International Publishing
Ceramic Thick Films for MEMS and Microdevices	Robert A. Dorey	2011	William Andrew Publishing
Mechanical Properties of Structural Films (ASTM Special Technical Publication, 1413)	Christopher L. Muhlstein, Stuart B. Brown (editors)	2001	ASTM International
MEMS for Automotive and Aerospace Applications	M. Kraft and N M White	2013	Woodhead Publishing
Ferroelectric Thin Films: Basic Properties and Device Physics for Memory Applications	Masanori Okuyama; Yoshihiro Ishibashi	2005	Springer Berlin Heidelberg
Nanostructures and Thin Films for Multifunctional Applications: Technology, Properties and Devices	Ion Tiginyanu; Pavel Topala; Veaceslav Ursaki	1st ed. 2016	Springer International Publishing
Handbook of Mems for Wireless and Mobile Applications	D. Uttamchandani	2013	Woodhead Publishing
Mechanical Properties of Materials	Joshua Pelleg	2013	Springer Netherlands
Mechanical Properties of Bamboo	Jules J.A. Janssen	1991	Springer Netherlands
Mechanical properties of polymers.	Norbert M. Bikales	1971	Wiley-Interscience
Mechanical Properties of Nanomaterials	Joshua Pelleg	1st ed. 2021	Springer International Publishing
Mechanical Properties of Polycarbonate	Weihong Zhang andYingjie Xu	2019	Elsevier
Mechanical Properties of Ceramics	Joshua Pelleg (auth.)	2014	Springer International Publishing
Mechanical properties of polymers	Lawrence E. Nielsen	1962	Van Nostrand Reinhold
Mechanical properties of redwood.	A. L. Heim	1912	Govt. Print. Off.
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Mechanical Properties of 3C-SiC Films for MEMS Applications	Jayadeep Deva Reddy, Alex A. Volinsky, Christopher L. Frewin, Chris Locke and Stephen E. Saddow	Fundamentals of nanoindentation and nanotribology IV: symposium held November 26-29, 2007, Boston, Massachusetts, U. S. A. /	Le Bourhis, Eric.	c2008.	Materials Research Society,
Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications	H. D. Espinosa, B. Peng, K.-H. Kim, B. C. Prorok, N. Moldovan, X. C. Xiao, J. E. Gerbi, J. Birrell, O. Auciello, J. A. Carlisle, D. M. Gruen and D. C. Mancini	Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines: symposium held December 2-4, 2002, Boston, Massachusetts, USA /	LaVan, David A.	[2003], ©2003.	Materials Research Society,
31 Epitaxial 3C-SiC Films		Silicon carbide microelectromechanical systems for harsh environments	Rebecca Cheung	2006	Imperial College Press; Distributed by World Scientific Pub
32 Polycrystalline 3C-SiC Films		Silicon carbide microelectromechanical systems for harsh environments	Rebecca Cheung	2006	Imperial College Press; Distributed by World Scientific Pub
52 Epitaxial 3C-SiC Films		Silicon carbide microelectromechanical systems for harsh environments	Rebecca Cheung	2006	Imperial College Press; Distributed by World Scientific Pub
53 Polycrystalline 3C-SiC Films		Silicon carbide microelectromechanical systems for harsh environments	Rebecca Cheung	2006	Imperial College Press; Distributed by World Scientific Pub
Hemocompatibility Assessment of 3C-SiC for Cardiovascular Applications	Norelli Schettini; Mark J. Jaroszeski; Leigh West; Stephen E. Saddow	Silicon Carbide Biotechnology	Stephen Saddow	2012	Elsevier
Hemocompatibility assessment of 3C-SiC for cardiovascular applications		Silicon carbide biotechnology: a biocompatible semiconductor for advanced biomedical devices and applications /	Saddow, Stephen E.	2012.	Elsevier,
Temperature dependence of electrical properties of 3C–SiC(111) heteroepitaxial films	Mitsugu Yamanaka; Keiko Ikoma	Wide-Band-Gap Semiconductors	C.G. Van de Walle	1993	Elsevier
Mechanical properties of films		Food Engineering Research Developments	Terrance P. Klening, Terrance P. Klening	2008	Nova Science Publishers, Inc.
Mechanical properties of films		Paint testing manual; physical and chemical examination of paints, varnishes, lacquers, and colors	G. G. Sward, Henry A. Gardner	1972	American Society for Testing and Materials
Piezoelectric Thin Films for MEMS Applications	Isaku Kanno	Integrated Microsystems: Electronics, Photonics, and Biotechnolgy	Krzysztof Iniewski	2012	Routledge
Piezoelectric Thin Films for MEMS Applications	Isaku Kanno	MEMS: Fundamental Technology and Applications	Vikas Choudhary; Krzysztof Iniewski	2014	Routledge
16. Mechanical Properties and Applications of DLC Films		Applications of Diamond Films and Related Materials	Y. Tzeng; M. Yoshikawa; M. Murakawa; A. Feldman	1991	Elsevier
37 Mechanical Properties of MEMS Structures		Microengineering Aerospace Systems	H. Helvajian	1999	AIAA
Mechanical behavior and properties of thin films for biomedical applications	A.H. Choi; B. Ben-Nissan; A. Bendavid; B. Latella	Thin Film Coatings for Biomaterials and Biomedical Applications	Hans J. Griesser	2016	Woodhead Publishing
Polar Oxide Thin Films for MEMS Applications	Paul Muralt	Chemical Solution Deposition of Functional Oxide Thin Films	Theodor Schneller; Rainer Waser; Marija Kosec; David Payne	2012	Springer Vienna
Optimization of mechanical properties of thin free-standing metal films for RF-MEMS	Jaap M. J. den Toonder and Auke R. van Dijken	Nanoenginered assemblies and advanced micro/nanosystems: symposia held April 13-16, 2004, San Francisco, California, U. S. A. /	Boning, Duane S.	[2004], ©2004.	Materials Research Society,
Mechanical Properties of Thin Films	Yichun Zhou; Li Yang; Yongli Huang	Micro- and MacroMechanical Properties of Materials	Yichun Zhou; Li Yang; Yongli Huang	2013	Routledge
Mechanical Properties of Thin Films	Milton Ohring	Materials Science of Thin Films (Second Edition)	Milton Ohring	2002	Academic Press
Chapter	Author(s)	Book	Book Authors	Year	Publisher

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